Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Sensors and Sensor Systems
سال: 2017
ISSN: 2194-878X
DOI: 10.5194/jsss-6-121-2017